New electronic materials are new materials used in electronic devices, optical devices, semiconductor devices, electric vehicles, photovoltaic power generation and other fields, such as gallium nitride, silicon carbide, aluminium nitride, indium nitride and so on. During the preparation and processing of new electronic materials, a certain amount of exhaust gases are generated.
Number
|
Control project
|
Exhaust pipe height(m)
|
Draft for soliciting opinions allows for emission rates (kg/h)
|
Emission release rate of version 93(kg/h)
|
Check location
|
1
|
NH3
|
15
|
0.6
|
4.9
|
Workshop or production facility exhaust pipe
|
2
|
C3H9N
|
15
|
0.15
|
0.54
|
|
3
|
H2S
|
15
|
0.06
|
0.33
|
|
4
|
CH3SH
|
15
|
0.006
|
0.04
|
|
5
|
(CH3)2S
|
15
|
0.06
|
0.33
|
|
6
|
C2H6S2
|
15
|
0.15
|
0.43
|
|
7
|
CS2
|
15
|
1.5
|
1.5
|
|
8
|
C8H8
|
15
|
3.0
|
6.5
|
|
9
|
Odor concentration
|
Exhaust pipe height (m) ≥ 15
|
Standard value (dimensionless) 1000
|
Standard value (dimensionless) 2000
|