Semiconductor manufacturing process used in the cleaning agent, developer, photoresist, etching solution and other solvents contain a large number of organic components. In the process, most of these organic solvents become exhaust gas emissions through volatilisation.
Number
|
Control project
|
Exhaust pipe height(m)
|
Draft for soliciting opinions allows for emission rates (kg/h)
|
Emission release rate of version 93(kg/h)
|
Check location
|
1
|
NH3
|
15
|
0.6
|
4.9
|
Workshop or production facility exhaust pipe
|
2
|
C3H9N
|
15
|
0.15
|
0.54
|
|
3
|
H2S
|
15
|
0.06
|
0.33
|
|
4
|
CH3SH
|
15
|
0.006
|
0.04
|
|
5
|
(CH3)2S
|
15
|
0.06
|
0.33
|
|
6
|
C2H6S2
|
15
|
0.15
|
0.43
|
|
7
|
CS2
|
15
|
1.5
|
1.5
|
|
8
|
C8H8
|
15
|
3.0
|
6.5
|
|
9
|
Odor concentration
|
Exhaust pipe height (m) ≥ 15
|
Standard value (dimensionless) 1000
|
Standard value (dimensionless) 2000
|